@inproceedings{benzerga:hal-00403015,
TITLE = {Gaz sensor prototype by laser processing},
AUTHOR = {Benzerga, Ratiba and Bouvr{\'e}e, Audrey and Castel, Xavier and Jaunault, Ronan and Feller, Jean-Fran{\c c}ois},
URL = {https://hal.science/hal-00403015},
BOOK
TITLE = {LPSD 2007 ''Laser Processing for Semiconductor Devices: Science and Technology''},
ADDRESS = {Saint-Malo, France},
YEAR = {2007},
MONTH = Oct, HAL_ID = {hal-00403015},
HAL_VERSION = {v1},
}