@inproceedings{castel:hal-00402948,
TITLE = {Room temperature deposition of ITO thin films for transparent electronic applications},
AUTHOR = {Castel, Xavier and Vigneron, Sonia and Legeay, G{\'e}rard},
URL = {https://hal.science/hal-00402948},
BOOK
TITLE = {E-MRS 2009 Spring Meeting ''European Material Research Society''},
ADDRESS = {Strasbourg, France},
YEAR = {2009},
MONTH = Jun, HAL_ID = {hal-00402948},
HAL_VERSION = {v1},
}