@inproceedings{ni:hal-00402625,
TITLE = {Microdispositifs pour applications capteurs},
AUTHOR = {Ni, Liang and Sala{\"u}n, Anne-Claire and Rogel, R{\'e}gis and Pichon, Laurent},
URL = {https://hal.science/hal-00402625},
BOOK
TITLE = {JNRDM 2009},
ADDRESS = {France},
YEAR = {2009},
MONTH = May, PDF = {https://hal.science/hal-00402625/file/Article_jnrdm_2009_Lyon_Microdispositifs_pour_applications_capteurs.pdf},
HAL_ID = {hal-00402625},
HAL_VERSION = {v1},
}