@article{cherfi:hal-00402490,
TITLE = {Deposition temperature effects on the characteristics of a-Si:H deposited by pulsed DC magnetron sputteringcharacteristic},
AUTHOR = {Cherfi, Rabah and Abdelmoumene, A. and Kechouane, M. and Rahal, A. and Aoucher, M. and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00402490},
JOURNAL = {physica status solidi (a)},
PUBLISHER = {Wiley},
VOLUME = {2006},
NUMBER = {7},
PAGES = {1504-1509},
YEAR = {2009},
MONTH = Jul, HAL_ID = {hal-00402490},
HAL_VERSION = {v1},
}