@inproceedings{zaghdoudi:hal-00397827,
TITLE = {Improving the quality of polysilicon active layer of TFTs and the TFT's performance by slight phosphorus doping},
AUTHOR = {Zaghdoudi, Mariem and Rogel, R{\'e}gis and Mohammed-Brahim, Tayeb and Jacques, Emmanuel},
URL = {https://hal.science/hal-00397827},
BOOK
TITLE = {23nd International Conference on Amorphous and Nanocrystalline Semiconductors},
ADDRESS = {Utrecht, Netherlands},
YEAR = {2009},
MONTH = Aug, HAL_ID = {hal-00397827},
HAL_VERSION = {v1},
}