@inproceedings{belarbi:hal-00397826,
TITLE = {Decreasing the thickness of the active layer of microcrystalline silicon TFTs},
AUTHOR = {Belarbi, Khaled and Kandoussi, Khalid and Souleiman, Isma{\"i}l and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00397826},
BOOK
TITLE = {23nd International Conference on Amorphous and Nanocrystalline Semiconductors},
ADDRESS = {Utrecht, Netherlands},
YEAR = {2009},
MONTH = Aug, HAL_ID = {hal-00397826},
HAL_VERSION = {v1},
}