@inproceedings{fedala:hal-00397821,
TITLE = {Low germanium fraction in microcrystalline silicon germanium Si1-XGeX},
AUTHOR = {Fedala, Abdelkrim and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Abdeslam, M. and Chami, A.},
URL = {https://hal.science/hal-00397821},
BOOK
TITLE = {23nd International Conference on Amorphous and Nanocrystalline Semiconductors},
ADDRESS = {Utrecht, Netherlands},
YEAR = {2009},
MONTH = Aug, HAL_ID = {hal-00397821},
HAL_VERSION = {v1},
}