@inproceedings{belarbi:hal-00397812,
TITLE = {Microcrystalline silicon TFTs with silicon nitride gate dielectric deposited at low temperature (150{\textdegree}C)},
AUTHOR = {Belarbi, Khaled and Coulon, Nathalie . and Simon, Claude and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00397812},
BOOK
TITLE = {International Thin Film Transistors Conference ITC'2009},
ADDRESS = {Paris, France},
YEAR = {2009},
MONTH = Mar, HAL_ID = {hal-00397812},
HAL_VERSION = {v1},
}