@inproceedings{cherfi:hal-00397806,
TITLE = {Correlation between quality of $\mu$c-Si film deposited at low temperature (<180 {\textdegree}C) by PECVD and TFTs characteristics},
AUTHOR = {Cherfi, Rabah and Kandoussi, Khalid and Fedala, Abdelkrim and Belarbi, Khaled and Coulon, Nathalie . and Simon, Claude and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00397806},
BOOK
TITLE = {International Thin Film Transistors Conference ITC'2009},
ADDRESS = {Paris, France},
YEAR = {2009},
MONTH = Mar, HAL_ID = {hal-00397806},
HAL_VERSION = {v1},
}