@article{legeay:hal-00360928,
TITLE = {Excimer laser beam/ITO interaction: from laser processing to surface reaction},
AUTHOR = {Legeay, G{\'e}rard and Castel, Xavier and Benzerga, Ratiba and Pinel, Jacques},
URL = {https://hal.science/hal-00360928},
JOURNAL = {physica status solidi (c)},
PUBLISHER = {Wiley},
VOLUME = {5},
PAGES = {3248-3254},
YEAR = {2008},
HAL_ID = {hal-00360928},
HAL_VERSION = {v1},
}