@inproceedings{legeay:hal-00355182,
TITLE = {Laser processing for home-made photomask: application to tunable devices},
AUTHOR = {Legeay, G{\'e}rard and Castel, Xavier and Benzerga, Ratiba and Moussavou, Arnaud-Gides and Sauleau, Ronan and Guilloux-Viry, Maryline},
URL = {https://hal.science/hal-00355182},
BOOK
TITLE = {EMRS 2008 Spring Meeting, Symposium B ''Laser and plasma in micro- and nano-scale materials''},
ADDRESS = {Strasbourg, France},
YEAR = {2008},
MONTH = May, HAL_ID = {hal-00355182},
HAL_VERSION = {v1},
}