@inproceedings{pichon:hal-00343031,
TITLE = {TP de nanotechnologie : caract{\'e}risation et nanolithographie AFM},
AUTHOR = {Pichon, Laurent and Demami, Fouad and Lhermite, Herv{\'e} and Rogel, R{\'e}gis},
URL = {https://hal.science/hal-00343031},
BOOK
TITLE = {Dixi{\`e}mes Journ{\'e}es P{\'e}dagogiques du CNFM},
ADDRESS = {Saint-Malo, France},
PUBLISHER = {Universit{\'e} Rennes1 - Centre Commun de Micro{\'e}lectronique de l'Ouest},
PAGES = {241-245},
YEAR = {2008},
MONTH = Nov, HAL_ID = {hal-00343031},
HAL_VERSION = {v1},
}