@article{ziani:hal-00342764,
TITLE = {Structural and dielectric properties of oxynitride perovskite LaTiOxNy thin films},
AUTHOR = {Ziani, Ahmed and Le Paven-Thivet, Claire and Le Gendre, Laurent and Fasquelle, Didier and Carru, Jean-Claude and Tessier, Franck and Pinel, Jacques},
URL = {https://hal.science/hal-00342764},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {517},
PAGES = {544-549},
YEAR = {2008},
MONTH = Jun, DOI = {10.1016/j.tsf.2008.06.061},
KEYWORDS = {LaTiOxNy ; Thin films ; Oxynitride ; Perovskite ; Epitaxy ; Reactive sputtering ; Dielectric constant},
HAL_ID = {hal-00342764},
HAL_VERSION = {v1},
}