@article{cordier:hal-00329478,
TITLE = {Evaluation of SiN films for AlGaN/GaN MIS-HEMTs on Si(111)},
AUTHOR = {Cordier, Yvon and Le Cotonnec, Aude and Chenot, S{\'e}bastien and Baron, Nicolas and Farih, Nacer and Besland, Marie-Paule and Goullet, Antoine and El Kazzi, Mario and Regreny, Philippe and Hollinger, Guy and Lhermite, Herv{\'e},
URL = {https://hal.science/hal-00329478},
JOURNAL = {physica status solidi (c)},
PUBLISHER = {Wiley},
VOLUME = {6},
NUMBER = {S2},
PAGES = {S1016-S1019},
YEAR = {2009},
MONTH = Jun, DOI = {10.1002/pssc.200880870},
HAL_ID = {hal-00329478},
HAL_VERSION = {v1},
}