@misc{nickel:hal-00318869,
TITLE = {Proceeding of ''Laser Processing for Semiconductor Devices, Science and Technology''},
AUTHOR = {Nickel, R. and Mohammed-Brahim, Tayeb and Bonnaud, Olivier},
URL = {https://hal.science/hal-00318869},
PUBLISHER = {Physica status solidi (c)},
NUMBER = {5/10},
PAGES = {3213},
YEAR = {2008},
MONTH = Jul, HAL_ID = {hal-00318869},
HAL_VERSION = {v1},
}