@article{bonnaud:hal-00318551,
TITLE = {Improvement of Silicon-Based Thin Film Transistor Performances by Modifying Technological Fabrication Process Steps: a Similar Approach with ULSI Technology},
AUTHOR = {Bonnaud, Olivier and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00318551},
JOURNAL = {ECS Transactions},
PUBLISHER = {Electrochemical Society, Inc.},
VOLUME = {8},
NUMBER = {1},
PAGES = {51-56},
YEAR = {2007},
HAL_ID = {hal-00318551},
HAL_VERSION = {v1},
}