@article{kandoussi:hal-00316416,
TITLE = {Nanocrystalline silicon TFT process using silane diluted in argon-hydrogen mixtures},
AUTHOR = {Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Belarbi, Khaled and Mohammed-Brahim, Tayeb},
URL = {https://hal.science/hal-00316416},
JOURNAL = {Journal of Non-Crystalline Solids},
PUBLISHER = {Elsevier},
VOLUME = {354},
PAGES = {2513-2518},
YEAR = {2008},
HAL_ID = {hal-00316416},
HAL_VERSION = {v1},
}