@inproceedings{farih:hal-00288425,
TITLE = {Passivation de mat{\'e}riaux et composants III-V par plasma ECR d'azote},
AUTHOR = {Farih, Nacer and Besland, Marie-Paule and Goullet, Antoine and El Kazzi, Mario and Regreny, Philippe and Hollinger, Guy and Lhermite, Herv{\'e} and Le Cotonnec, Aude and Chenot, S{\'e}bastien and Baron, Nicolas and Cordier, Yvon},
URL = {https://hal.science/hal-00288425},
BOOK
TITLE = {JNMO'08 : 12{\`e}mes Journ{\'e}es Nano Micro et Opto{\'e}lectronique},
ADDRESS = {Saint-Pierre-d'Ol{\'e}ron, France},
YEAR = {2008},
MONTH = Jun, HAL_ID = {hal-00288425},
HAL_VERSION = {v1},
}