@article{pier:hal-00176887,
TITLE = {Microcrystalline silicon and excimer laser crystallized silicon Thin Film Transistors on the same substratel},
AUTHOR = {Pier, Tanguy and Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Lhermite, Herv{\'e} and Mohammed-Brahim, Tayeb and Bergamini, Jean-Fran{\c c}ois},
URL = {https://hal.science/hal-00176887},
JOURNAL = {Thin Solid Films},
PUBLISHER = {Elsevier},
VOLUME = {515},
NUMBER = {19},
PAGES = {7585-7589},
YEAR = {2007},
MONTH = Jul, DOI = {10.1016/j.tsf.2006.11.164},
KEYWORDS = {Thin Film Transistors ; Microcrystalline silicon ; Laser crystallization},
HAL_ID = {hal-00176887},
HAL_VERSION = {v1},
}