@inproceedings{pier:hal-00176356,
TITLE = {Excimer Laser Crystallisation of Microcrystalline Silicon for TFTs on Flexible Substrate},
AUTHOR = {Pier, Tanguy and Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Lhermite, Herv{\'e},
URL = {https://hal.science/hal-00176356},
BOOK
TITLE = {Laser Processing for Semiconductor Devices : Sciences and Technology},
ADDRESS = {Saint-Malo, France},
YEAR = {2007},
MONTH = Oct, HAL_ID = {hal-00176356},
HAL_VERSION = {v1},
}
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