@inproceedings{pier:hal-00163492,
TITLE = {Excimer laser crystallization of microcrystalline silicon for TFTs on flexible substrate},
AUTHOR = {Pier, Tanguy and Kandoussi, Khalid and Simon, Claude and Coulon, Nathalie . and Mohammed-Brahim, Tayeb and Lhermite, Herv{\'e},
URL = {https://hal.science/hal-00163492},
BOOK
TITLE = {22' International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS 22)},
ADDRESS = {BRECKENRIDGE, CO, United States},
YEAR = {2007},
MONTH = Aug, HAL_ID = {hal-00163492},
HAL_VERSION = {v1},
}
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