@inproceedings{salaun:hal-00086552,
TITLE = {Suspended-Gate Thin Film Transistor as highly sensitive humidity sensor},
AUTHOR = {Sala{\"u}n, Anne-Claire and Mahfoz-Kotb, H. and Mohammed-Brahim, Tayeb and Le Bihan, France and Lhermite, Herv{\'e} and Bendriaa, F.},
URL = {https://hal.science/hal-00086552},
BOOK
TITLE = {SPIE's International Symposium Microtechnologies for the New Millenium},
ADDRESS = {Sevilla, Spain},
YEAR = {2005},
HAL_ID = {hal-00086552},
HAL_VERSION = {v1},
}