@inproceedings{salaun:hal-00086549,
TITLE = {Tutorial in clean room for microtechnology teaching: fabrication of an integrated humidity sensor},
AUTHOR = {Sala{\"u}n, Anne-Claire and Lhermite, Herv{\'e} and Coulon, Nathalie . and Bonnaud, Olivier},
URL = {https://hal.science/hal-00086549},
BOOK
TITLE = {EAEEIE'05 (European Association for Education in Electrical and Information Engineering)},
ADDRESS = {Lappeenranta, Finland},
YEAR = {2005},
HAL_ID = {hal-00086549},
HAL_VERSION = {v1},
}