@article{mahfozkotb:hal-00086538,
TITLE = {Air-gap polysilicon Thin film transistors on glass substrates},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Coulon, Nathalie . and Bonnaud, Olivier},
URL = {https://hal.science/hal-00086538},
JOURNAL = {Sensors and Actuators A: Physical },
PUBLISHER = {Elsevier},
VOLUME = {113},
PAGES = {p 344-349},
YEAR = {2004},
HAL_ID = {hal-00086538},
HAL_VERSION = {v1},
}