@article{zaghdoudi:hal-00085681,
TITLE = {Control of the weak phosphorus doping in polysilicon},
AUTHOR = {Zaghdoudi, Mariem and Abdelkrim, M. and Fathallah, M. and Mohammed-Brahim, Tayeb and Le Bihan, France},
URL = {https://hal.science/hal-00085681},
JOURNAL = {Materials Science Forum},
PUBLISHER = {Trans Tech Publications Inc.},
VOLUME = {480-481},
PAGES = {305-308},
YEAR = {2005},
HAL_ID = {hal-00085681},
HAL_VERSION = {v1},
}