@article{mahfozkotb:hal-00085667,
TITLE = {Silicon films deposited by Low-Pressure Chemical Vapour Deposition for microsystems},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Mohammed-Brahim, Tayeb and Bendriaa, F. and Le Bihan, France and Bonnaud, Olivier},
URL = {https://hal.science/hal-00085667},
JOURNAL = {Solid State Phenomena},
PUBLISHER = {Trans Tech Publications Ltd },
VOLUME = {93},
PAGES = {453-458},
YEAR = {2003},
HAL_ID = {hal-00085667},
HAL_VERSION = {v1},
}