@article{mahfozkotb:hal-00085655,
TITLE = {Sensing sensibility of surface micromachined suspended gate polysilicon thin film transistors},
AUTHOR = {Mahfoz-Kotb, H. and Sala{\"u}n, Anne-Claire and Bendriaa, F. and Le Bihan, France and Mohammed-Brahim, Tayeb and Morante, J.R.},
URL = {https://hal.science/hal-00085655},
JOURNAL = {Sensors and Actuators B: Chemical},
PUBLISHER = {Elsevier},
VOLUME = {Vol 118, issue1-2},
PAGES = {243-248},
YEAR = {2006},
MONTH = Oct, KEYWORDS = {Surface micromachining ; Suspended gate thin film transistor ; Gas-sensor},
HAL_ID = {hal-00085655},
HAL_VERSION = {v1},
}